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VCD Process Control Module

The VCD process control module is a thin film measurement instrument from TDM Technology. VCD process control module for in-situ thickness, PL metrology and reflectance during vacuum drying. Flange-port installation, modular PL and thickness heads, real-time feedback for closed-loop VCD process control. It is part of the In-situ Real-time Monitoring series.

VCD process control module
VCD process control module measurement result 1
VCD process control module measurement result 2
VCD process control module measurement result 3
VCD process control module measurement result 4
ItemPLThickness
Size40*40*199mm180*180*50 mm
Weight0.5kg1.5kg
FunctionalityPL (intensity, peak position, FWHM, bandgap)Thickness, Reflectance Measurement range: 5-1200 nm
Sample Size10*10 mm~220*220 mm (Customizable)10*10 mm~220*220 mm (Customizable)
SamplingPiontPoint
Repeatability±1%±0.5 %
Calculation<1sec/point<1sec/point
Voltage24V24V
Power5W15W

Functionalities

  • In-situ thickness, PL metrology, Reflectance during VCD process

  • Installed on the flange port

Advantages

  • Modular design for easy installation

  • Real-time data feedback during VCD process

  • Easy deployment with computer & software connected

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