In-Situ Film Thickness Monitoring for Coating Processes
TDM's in-situ series covers two verified product routes: coating-head-mounted wet-film thickness and reflectance monitoring with SE31 and SE310, plus wide-band transmission/reflection optical-film monitoring with SE31-FM. Explore the complete in-situ thin film measurement platform.
Two In-Situ Monitoring Routes
Select the product family by coating process, film type, measurement mode and required control interface.
Slot-Die Wet-Film Monitoring
SE31 and SE310 mount on the slot-die coating head and measure wet-film thickness and reflectance while coating is running. Ethernet, local computing, SDK integration and machine start/stop triggers connect measurement to the coating cycle.
Wide-Band Optical-Film Monitoring
SE31-FM is a dual-use transmission and reflection optical film thickness monitor. Its published applications cover optical coating processes, semiconductor manufacturing, photovoltaic films and flexible-electronics R&D.
Compare SE31, SE310 and SE31-FM
SE31 and SE310 share the slot-die wet-film workflow. SE31-FM serves a different optical-film monitoring route and must not be treated as a coating-head wet-film module.
| Item | SE31 | SE310 | SE31-FM |
|---|---|---|---|
| Product focus | Slot-die wet-film coating | Slot-die wet-film coating | Optical-film monitoring |
| Measurement | Thickness / Reflectance | Thickness / Reflectance | Transmission / Reflection dual mode |
| Published spectral coverage | Not published on the product page | 350–1100 nm light source; 200–1100 nm spectrometer | 350–2400 nm |
| Integration | SDK + slot-die start/stop signals | SDK + slot-die start/stop signals | RS-232/485, TCP/IP, analog output, PLC |
| Published performance | Not published on the product page | 300 nm–20 µm; < 1% repeatability; 15 Hz | < 0.2 nm wavelength resolution; ±0.001% noise; ±0.1% film-thickness accuracy on standard optical-film systems |
| Product details | View SE31 | View SE310 | View SE31-FM |
Published values are model-specific. Do not transfer one model's numerical specifications or installation method to another model.
How SE31 and SE310 Integrate with Slot-Die Coating
The wet-film route measures on the coating head, processes data locally and exposes results to the line through the SDK.
Mount on the Coating Head
SE31 and SE310 are modular wet-film metrology units designed to mount directly on the slot-die coating head, so measurement takes place while the coating process is running.
Measure Thickness and Reflectance
The modules monitor wet-film thickness and reflectance in real time. SE310 supports continuous single-spot sampling at 15 Hz, with local data processing in under one second.
Connect the Server and SDK
Ethernet and power connect the modules to the local computing server. The SDK exposes measurement data, while start and stop signals from the slot-die machine synchronize monitoring with the coating cycle.
Why Monitor During Slot-Die Coating?
Measuring on the coating head makes process data available while wet-film coating is running, instead of waiting for a separate downstream or laboratory check.
Real-Time Data Feedback
Thickness and reflectance data are reported during the coating cycle. The SDK makes these measurements available to the customer's computing and process-control environment.
Modular Installation
The metrology module mounts on the coating head and connects to the local server by Ethernet and power, supporting integration without a separate standalone measurement station.
Coating-Cycle Synchronization
Start and stop trigger signals from the slot-die machine align data collection with the active coating cycle, keeping measurement timing tied to the production process.
Published SE310 Performance Specifications
SE310 provides the following verified configuration data for slot-die wet-film thickness and reflectance monitoring.
| Property | Published value |
|---|---|
| Light source | Halogen lamp, 350–1100 nm |
| Film thickness range | 300 nm–20 µm |
| Measurement repeatability | < 1% |
| Sampling | Continuous single spot, 15 Hz |
| Spot size / working distance | 1.5–2 mm / < 5 mm |
| Data processing | Local computing server, < 1 s |
See the SE310 product page for dimensions, electrical requirements and the complete specification table.
SE31-FM Wide-Band Optical-Film Monitoring
SE31-FM expands the in-situ series beyond slot-die wet-film monitoring. It combines visible and near-infrared spectral coverage with intelligent transmission/reflection switching for optical film-thickness monitoring.
| Property | Published value |
|---|---|
| Spectral range | 350–2400 nm (visible + near-infrared) |
| Measurement mode | Transmission / reflection intelligent auto-switching |
| Wavelength resolution | < 0.2 nm |
| System noise level | ±0.001% |
| Monitoring accuracy | Film thickness ±0.1% on standard optical-film systems |
| Communication and control | RS-232/485, TCP/IP, analog output and PLC integration |
Published applications include optical coating processes, semiconductor manufacturing, photovoltaic films and flexible electronics R&D. Compatible materials listed for the model include SiO₂, MgF₂, Al₂O₃, Ta₂O₅, Nb₂O₅, TiO₂ and Si₃N₄.
See the SE31-FM product page for the complete specification table.
Choose a TDM In-Situ Monitoring Configuration
Start with the coating process and measurement mode. For slot-die wet-film thickness and reflectance, compare SE31 and SE310. For wide-band optical-film monitoring with transmission/reflection switching, evaluate SE31-FM.
- SE31: coating-head wet-film thickness and reflectance with SDK and machine triggers; confirm configured numerical ranges with TDM.
- SE310: published 300 nm–20 µm range, 15 Hz continuous single-spot sampling and local processing below one second.
- SE31-FM: 350–2400 nm T/R optical-film monitoring with serial, TCP/IP, analog and PLC integration.
- Selection inputs: film stack, thickness range, optical mode, sampling requirement, working distance and control interface.
Review all TDM in-situ real-time monitoring equipment or send your coating process and integration requirements for configuration confirmation. For a deeper walkthrough of wet-film, VCD and optical-film routes — including published ranges and control interfaces — see In-Situ Thin Film Monitoring.
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Frequently Asked Questions
What is in situ metrology?
In situ metrology measures a film at the process location while coating is running. TDM offers two verified product routes: SE31 and SE310 for coating-head-mounted slot-die wet-film thickness and reflectance monitoring, and SE31-FM for wide-band transmission/reflection optical-film monitoring.
How does in situ measurement differ from inline measurement?
Inline measurement inspects material at a defined production-line station, often between process steps. In-situ measurement monitors the film at the active coating process. For TDM slot-die systems, SE31 and SE310 collect thickness and reflectance data from the coating head during the coating step.
What is the difference between SE31 and SE310?
Both platforms are specified for real-time wet-film thickness and reflectance monitoring. SE310 publishes a 300 nm–20 µm film-thickness range, less than 1% repeatability and 15 Hz continuous single-spot sampling.
What is SE31-FM used for?
SE31-FM is a wide-band dual-use optical film thickness monitor with intelligent transmission/reflection switching. Its published applications include optical coating processes, semiconductor manufacturing, photovoltaic films and flexible-electronics R&D.
How are TDM in-situ monitors integrated?
SE31 and SE310 use Ethernet and power to connect the coating-head module to a local computing server; the SDK exposes measurement data and slot-die start/stop signals synchronize monitoring. SE31-FM supports RS-232/485, TCP/IP, analog output and PLC integration.
