
EL/PL&Defect Mapping Instrument



Specification
| Product Model | SE60 |
|---|---|
| Sample Size | 310 mm * 310mm |
| Resolution | 5K |
| Image Format | Original: BMP; Heat Map: jpg |
| Camera | Linear scan camera (PL mapping), Area Camera (EL mapping) |
| Camera Number | 2 |
| Filter Lens | Support |
| PL light source | LED, 450nm (can be customized as required) |
| EL power supply | Constant current or constant voltage mode, 80V/10A; Accuracy: ±0.01V, ±0.001A |
Functionalities

All-in-one EPL functionalities merged together

Patented algorithm: EL mapping, PL mapping and AI-powered multi-defect precision analysis

Single Scan eliminates misalignment and brightness variation

Expert services based on the analysis results
To be customized:

Sample Size (Instrument Size & Camera Number)

Resolution

Machine Learning function (need work with customer for training)



