
Defect Mapping Instrument


Specification
| Product Model | SE20 |
|---|---|
| Resolution | 60μm/pixel |
| Detection area | 250×250mm |
Functionalities

Statistical analysis function for different sizes

Automated defect screening based on process-validated criteria
To be customized:

Resolution: up to 5μm/pixel

Detection Area: up to 2400 * 1600 mm (with more cameras)

Machine Learning: To detect different shapes of defects (need work with customer for training)



