TDM Technology

Defect Mapping Instrument

10% Cost v.s. 90% Features
Specification
Product ModelSE20
Resolution60μm/pixel
Detection area250×250mm

Functionalities

  • Statistical analysis function for different sizes

  • Automated defect screening based on process-validated criteria

To be customized:

  • Resolution: up to 5μm/pixel

  • Detection Area: up to 2400 * 1600 mm (with more cameras)

  • Machine Learning: To detect different shapes of defects (need work with customer for training)

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