SE10
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3D Optical Profiler with scan platform
3D Optical Profiler with scan platform
Specification
| Product Model | SE320 |
|---|---|
| Measurement Principle | White Light Interferometry (WLI) + Phase-Shift Interferometry (PSI) |
| XY Stage Travel | 200 mm × 200 mm (Fully automatic precision motorized stage with closed-loop grating encoders) |
| Z-axis Measuring Range | 100 mm (Autofocus travel, supports high-step measurement) |
| Measurement Accuracy | RMS repeatability ≤ 0.1 nm under PSI mode; vertical resolution up to 0.01 nm |
| Optical Magnification Configuration | Automatic switching among five objective lenses: 5X / 10X / 20X / 50X / 100X |
| Imaging Acquisition System | 5-megapixel high-sensitivity industrial CCD camera (2592 × 1944 resolution) |
