
Hi-Resolution AOI&EPL Mapping Integrated Instrument


Specification
| Product Model | SE80 |
|---|---|
| Scan area | 20 * 20 mm |
| Target | PVK Thin Film |
| Resolution | 3.15 um/pixel |
| Camera | Sony ILCR-7RM5 |
| Camera Number | 1 |
| Size | 500*800*1558mm |
| Weight | around 150Kg |
Functionalities

AOI & EPL functionalities all integrated

Defects cross comparison among AOI and EPL mapping

Statistical analysis function for pores of different sizes
To be customized:

Sample Size (Instrument Size & Camera Number)

Resolution

Machine Learning function (need work with customer for training)



