SE10 Portable PL Metrology Instrument
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SE310 3D Optical Profiler
3D Optical ProfilerThe SE310 is a 3D Optical Profiler from TDM Technology. SE310 3D optical profiler using light-section triangulation. 0.1 µm resolution, 300×150×70mm measuring range and 12–160× continuous motorized zoom. It is part of the Offline Thin Film Measurement series.
Measurement principle
The SE310 uses Light-section method (Triangulation ranging principle).
Specifications
| Product Model | SE310 |
|---|---|
| Measurement Principle | Light-section method (Triangulation ranging principle) |
| Resolution | 0.1 μm (High-precision grade) |
| Maximum Scanning Speed | 1 scan/second (Full-area surface scanning mode) |
| Maximum Measuring Range | 300 × 150 × 70 mm (X, Y, Z axes) |
| Optical Magnification | 12 ~ 160× continuous motorized zoom |
| Core Optical System | Dual telecentric optical imaging system; distortion-free imaging without perspective error |
